Lithography (EUV)
Türkçe: Litografi (EUV)
The process of printing circuit patterns onto silicon with light; EUV (extreme ultraviolet) at 13.5 nm wavelength makes the smallest structures possible.
// EXPLANATION
The pattern is projected from a mask onto a photoresist-coated wafer, followed by etching and doping steps. EUV machines are extremely complex and costly; only one company in the world (ASML) builds them.
// ALSO KNOWN AS
EUVlithography
// RELATED TERMS
Nanometre (process node)The name of a chip manufacturing technology (for example 3 nm, 2 nm); today it works more as a marketing label than a real length.
SemiconductorA material whose conductivity lies between a conductor and an insulator and can be controlled by doping (such as silicon).
GAAFET (gate-all-around)A next-generation transistor structure in which the gate surrounds the channel on all sides; the successor to FinFET, used in the 2 nm class.
